JPH0263534U - - Google Patents
Info
- Publication number
- JPH0263534U JPH0263534U JP14356288U JP14356288U JPH0263534U JP H0263534 U JPH0263534 U JP H0263534U JP 14356288 U JP14356288 U JP 14356288U JP 14356288 U JP14356288 U JP 14356288U JP H0263534 U JPH0263534 U JP H0263534U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- holder
- semiconductor substrate
- holder provided
- target material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 239000013077 target material Substances 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims 2
- 210000000078 claw Anatomy 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14356288U JPH0263534U (en]) | 1988-11-01 | 1988-11-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14356288U JPH0263534U (en]) | 1988-11-01 | 1988-11-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0263534U true JPH0263534U (en]) | 1990-05-11 |
Family
ID=31410494
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14356288U Pending JPH0263534U (en]) | 1988-11-01 | 1988-11-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0263534U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004269988A (ja) * | 2003-03-10 | 2004-09-30 | Canon Inc | スパッタ装置 |
-
1988
- 1988-11-01 JP JP14356288U patent/JPH0263534U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004269988A (ja) * | 2003-03-10 | 2004-09-30 | Canon Inc | スパッタ装置 |